Content-Based Image Retrieval for Semiconductor Process Characterization
نویسندگان
چکیده
منابع مشابه
Content-Based Image Retrieval for Semiconductor Process Characterization
Image data management in the semiconductor manufacturing environment is becoming more problematic as the size of silicon wafers continues to increase, while the dimension of critical features continues to shrink. Fabricators rely on a growing host of image-generating inspection tools to monitor complex device manufacturing processes. These inspection tools include optical and laser scattering m...
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ژورنال
عنوان ژورنال: EURASIP Journal on Advances in Signal Processing
سال: 2002
ISSN: 1687-6180
DOI: 10.1155/s1110865702203017